Spectroscopic studies of metal high-k dielectrics: transition metal oxides and silicates, and complex rare earth/transition metal oxides

نویسندگان

  • G. Lucovsky
  • J. G. Hong
  • C. C. Fulton
  • Y. Zou
  • R. J. Nemanich
  • H. Ade
  • J. L. Freeouf
چکیده

G. Lucovsky 1, 2, , J. G. Hong, C. C. Fulton, Y. Zou, R. J. Nemanich, H. Ade, D. G. Scholm, and J. L. Freeouf 5 1 Department of Physics, North Carolina State University, USA 2 Department of Materials Science & Engineering, North Carolina State University, USA 3 Department of Electrical & Computer Engineering, North Carolina State University, USA 4 Department of Materials Science & Engineering, Pennsylvania State University, USA 5 Department of Electrical & Computer Engineering, Oregon Graduate Institute, USA

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تاریخ انتشار 2004